PHI Quantera SXM

Description

The PHI Quantera SXM is a Scanning Photoelectron Spectrometer Microprobe (XPS, also known as ESCA). It is used for quantitative analysis of the chemical elements and chemical states within the top few nanometers of a surface. The Quantera features a focussed, monochromated X-ray source for small-spot analysis, and it is automated for high sample throughput. Depth profiling can be accomplished with automated ion milling.

Sample Images (click image for details)

General Specifications

The NCFL's PHI Quantera SXM is equipped with:
• A scanning monochromatic X-ray source with a highly focused beam (<9 microns) for rapid chemical state imaging
• 75 mm sample platen, automated sample introduction and stage movement
• Capable of performing analytical surveys, high-resolution multiplexes, sputter depth profiles, line scans, chemical images, automated analyses with user-defined settings
• Hot/Cold stage

Detailed Specifications